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Optimal Orientations of Quartz Crystals for Bulk Acoustic Wave Resonators with the Consideration of Thermal Properties

机译:体声波作用下石英晶体的最佳取向   考虑热性能的谐振器

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摘要

Piezoelectric crystals are widely used for acoustic wave resonators ofdifferent functioning modes and types including BAW and SAW. It is well-knownthat only some special orientations of crystals will exhibit desirableproperties such as mode couplings, thermal sensitivity, accelerationsensitivity, and others that are important in design and applications ofresonators. With extensive studies on physical properties in last decades andincreasing industrial needs of novel products, it is necessary to comb theknown knowledge of quartz crystal material for novel orientations and betterproducts as agendas in the industry. With known material properties likeelastic, piezoelectric, dielectric, and thermal constants, we can establish therelationships between vibrations and bias fields such as temperature to ensurea resonator immunizing from excessive response to changes causing significantdegradation of resonator properties and performances. Since the theoreticalframework of wave propagation in piezoelectric solids is known, we need to usethe existing data and results for the validation of current orientations inactual products. The agreement will give us needed confidence of the theory andanalytical procedures. Through rotations, we calculated physical properties asfunctions of angles and bias fields, enabling the calculation of resonatorproperties for the identification of optimal cuts. Such a procedure can also beapplied to similar crystals for a careful examination of possible orientationsto maximize the potential use of materials in acoustic wave resonators.
机译:压电晶体广泛用于具有不同功能模式和类型的声波谐振器,包括BAW和SAW。众所周知,只有某些特殊的晶体取向会表现出理想的特性,例如模式耦合,热灵敏度,加速度灵敏度,以及在谐振器的设计和应用中很重要的其他特性。在过去的几十年中,随着对物理性能的广泛研究以及对新产品的工业需求的增加,有必要将已知的石英晶体材料知识用于新颖的取向和更好的产品作为行业议程。利用已知的材料特性(例如弹性,压电,介电常数和热常数),我们可以在振动和偏置场(例如温度)之间建立关联,以确保谐振器免受对变化的过度响应而导致谐振器性能和性能大幅下降。由于已知压电固体中波传播的理论框架,因此我们需要使用现有数据和结果来验证当前方向的实际产品。该协议将使我们对理论和分析程序充满信心。通过旋转,我们计算了物理特性随角度和偏置场的变化,从而能够计算出谐振器特性,以识别最佳切口。这样的程序也可以应用于相似的晶体,以仔细检查可能的取向,以最大程度地利用声波谐振器中的材料。

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